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PlasmaTherm SLR-770 - Micro and Nanotechnology Laboratory - Illinois
PlasmaTherm SLR-770 Inductively Coupled Plasma Reactive Ion Etcher A 6 inch diameter parallel plate reactive ion etch system, the Plasma Therm shuttlelock SSL-770 is configured with a loa...
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News - Micro and Nanotechnology Laboratory - Illinois
By The Numbers A user facility, MNTL provides 300 students and other researchers with all the advanced tools they need for conducting photonics, microelectronics, biotechnology, and nanotechnology res...
Domain history
| Web host: | University of Illinois |
| Registrar: | EDUCASE |
| Registrant: | UNIVERSITY OF ILLINOIS |
| Updated: | June 21, 2024 |
| Expires: | January 01, 1970 |
| Created: | January 13, 1997 |
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